Axcelis to Present at The CIBC World Markets Annual Communications and

    Business Editors/Technology Editors
    CIBC World Markets Annual Communications and Technology Conference

    BEVERLY, Mass.--(BUSINESS WIRE)--May 3, 2005--Axcelis Technologies, Inc. (Nasdaq: ACLS) is pleased to announce that Donald Palette, vice president of finance, and James Kawski, director of investor relations and corporate development, will be presenting at the CIBC World Markets Annual Communications and Technology Conference. This year's conference will be held May 10-11, 2005, at the Grand Hyatt New York.
    Palette and Kawski will present on Tuesday, May 10 at 1:40pm ET. For those who cannot attend, the presentation will be available via live Webcast and archived for 30 days, accessible on the Axcelis Web site at www.axcelis.com.

    About Axcelis Technologies, Inc.

    Axcelis Technologies, Inc., headquartered in Beverly, Massachusetts, provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation, rapid thermal processing, and cleaning and curing systems. Axcelis Technologies has key technology centers in Beverly, Massachusetts, as well as in Toyo, Japan through its joint venture, SEN. The company's Internet address is: www.axcelis.com.

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CONTACT: Axcelis Technologies, Inc. Maureen Hart, 978-787-4266 maureen.hart@axcelis.com or Investor Contact: James Kawski, 978-787-4000 investor.relations@axcelis.com or Loomis Group Stacy Grisinger, 617-638-0022 grisingers@loomisgroup.com

KEYWORD: MASSACHUSETTS NEW YORK TRACK INDUSTRY KEYWORD: HARDWARE TELECOMMUNICATIONS SOFTWARE TRADESHOW SOURCE: Axcelis Technologies, Inc.

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