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16.05.2006 12:30:00

Therma-Wave Wins Initial Order from Leading Data Storage Manufacturer; Milestone Order Marks the First Deployment of Therma-Wave's Advanced Opti-Probe Technology Outside of the Semiconductor Market

Therma-Wave, Inc. (Nasdaq:TWAV), a worldwide leader inthe development, production and sale of process control metrologysystems, today announced the company has received its first order froma leading data storage provider for its Opti-Probe(R) 7341XP thin-filmand critical dimension (CD) metrology system. Therma-Wave's Opti-Probesystem will be deployed to support advanced data storage developmentand manufacturing processes for nano-technology applications.

"This order reflects an important milestone for Therma-Wave as weexpand the addressable market for our advanced Opti-Probe metrologyproduct beyond our core semiconductor customer base. We are extendingour strategic business model and generating a significant new growthopportunity for our Opti-Probe business by leveraging our currentleading edge Opti-Probe platform to penetrate a new technology sector.This customer commitment recognizes our ability to deliverstate-of-the-art metrology to complementary markets that requireprecision measurement. We look forward to the opportunity that thisnew market presents for our Opti-Probe platform," commented BorisLipkin, president and chief executive officer of Therma-Wave.

About Therma-Wave, Inc.

Since 1982, Therma-Wave, Inc. has been revolutionizing processcontrol metrology systems through innovative proprietary products andtechnologies. The Company is a worldwide leader in the development,manufacture, marketing and service of process control metrologysystems used in the manufacture of semiconductors. Therma-Wavecurrently offers leading-edge products to the semiconductormanufacturing industry for the measurement of transparent andsemi-transparent thin films; for the measurement of criticaldimensions and profile of IC features; and for the monitoring of ionimplantation. For further information about Therma-Wave, Inc., you mayaccess the Company's web site at: www.thermawave.com.

Safe Harbor Statement

This press release contains forward-looking statements thatinvolve risks and uncertainties, as well as assumptions that, if theydo not fully materialize or prove incorrect, could cause our actualresults to differ materially from those expressed or implied by suchforward-looking statements. Such forward-looking statements includestatements regarding significant new growth opportunities andstatements regarding our positioning to address current and futuremarket needs. Factors that could cause actual results to differmaterially from the forward-looking statements include the cyclicalityof our business, the loss of one or more large customers, thecancellation of one or more orders by our customers, our ability toprotect our intellectual property, our ability to successfully competeagainst larger companies, our ability to access additional capital inthe future, our ability to develop new and advanced products in thefuture, our ability to attract and retain key personnel, our abilityto receive supplies from single source suppliers, business decisionsby third parties that are out of our control, disruptions at ourmanufacturing facilities and general political, economic and stockmarket conditions and events, both domestically and internationally.These factors and others are described in more detail in our publicreports filed with the Securities and Exchange Commission, such asthose discussed in the "Factors Affecting Future Results" section ofour Annual Report on Form 10-K for the fiscal year ended April 3,2005, all quarterly reports on Form 10-Q for the following fiscalquarters, all subsequent current reports on Form 8-K and our priorpress releases. All forward-looking statements in this press releaseare based on information available to us as of the date hereof, and weassume no duty to update these forward-looking statements.

Note: Opti-Probe is a registered trademark of Therma-Wave, Inc.

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