Axcelis to Present at Credit Suisse First Boston 2005 Global Semicondu

    Business Editors/High-Tech Writers
    Credit Suisse First Boston 2005 Global Semiconductor &
    Capital Equipment Conference

    BEVERLY, Mass.--(BUSINESS WIRE)--March 1, 2005--Axcelis Technologies, Inc. (NASDAQ: ACLS) is pleased to announce that Michael Luttati, chief operating officer, and Stephen Bassett, chief financial officer, will be presenting at the Credit Suisse First Boston 2005 Global Semiconductor & Capital Equipment Conference. This year's conference will be held March 2-4, 2005, at the Ritz-Carlton, South Beach in Miami Beach, Florida.
    Luttati and Bassett will present on Thursday, March 3 at 3:00 pm EST. For those who cannot attend, the presentation will be available via live Webcast and archived for 30 days, accessible on the Axcelis Web site at www.axcelis.com.

    About Axcelis Technologies, Inc.

    Axcelis Technologies, Inc., headquartered in Beverly, Massachusetts, provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation, rapid thermal processing, and cleaning and curing systems. Axcelis Technologies has key product development centers in Beverly, Massachusetts, as well as in Toyo, Japan through its joint venture, SEN. The company's Internet address is: www.axcelis.com.

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CONTACT: Company Contact: Axcelis Technologies, Inc. Maureen Hart, 978-787-4266 Fax: 978-787-4275 maureen.hart@axcelis.com or Investor Contact: Axcelis Technologies, Inc. James Kawski, 978-787-4000 Fax: 978-787-9133 investor.relations@axcelis.com or Agency Contact: Loomis Group Stacy Grisinger, 617-638-0022 Fax: 617-638-0033 grisingers@loomisgroup.com

KEYWORD: MASSACHUSETTS FLORIDA TRACK INDUSTRY KEYWORD: HARDWARE MANUFACTURING TRADESHOW SOURCE: Axcelis Technologies, Inc.

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